Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications
نویسندگان
چکیده
We report the integration of high-quality epitaxial La2/3Sr1/3MnO3 (LSMO) thin films onto SrTiO3 buffered Silicon-on-Sapphire (SOS) substrates by combining state-of-the-art film growth techniques such as molecular beam epitaxy and pulsed laser deposition. Detailed structural, magnetic electrical characterizations LSMO/STO/SOS heterostructures show that LSMO properties are competitive with those directly grown on oxide substrates. X-ray circular dichroism measurements Mn L2,3 edges strong dichroic signal at room temperature, angular-dependent in-plane magneto-optical Kerr magnetometry reveal isotropic anisotropy. Suspended micro-bridges were thus finally fabricated silicon micromachining, demonstrating potential use integrating layer industrially compatible SOS for development applicative MEMS devices.
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2022
ISSN: ['1873-5584', '0169-4332']
DOI: https://doi.org/10.1016/j.apsusc.2021.152095